The Earthquake Engineering Online Archive  NISEE e-Library

Identifier: Text-201102232
Title: Backside feature transfer during electrostatic chucking
Creator(s): Brandstetter, Gerd

Identifier: Text-201106103
Title: Chucking pressures for idealized Coulomb-type electrostatic chucks
Creator(s): Brandstetter, Gerd; Govindjee, Sanjay